Enhanced proton backscattering spectrometry (EPBS) method was utilized in this paper for tritium/deuterium analysis in titanium film, and the results of tritium obtained by EPBS method were compared with PVT method. The substrate of Ti films used in our experiment was thick Mo slab, the experimental spectrum of Mo at low energy region cannot be fitted well, which may lead to inaccurate results. Therefore, a TiH1.81 film with thick Mo substrate was used to remove the influence of Mo background yield in experimental spectra. After subtracting the Mo background yield in experimental spectra we can fit well the tritium and deuterium spectra directly, which could make the results obtained by EPBS method more accurate.
