Intermetallic compound Cu9Al4、CuAl2 and Cu4Al nanoparticle were prepared by flow levitation method. The morphologies, granularities and structures of particles were investigated by TEM, XRD techniques. The analysis indicated that the grain size of these nanopowder is about 20~60 nm, and it can be controlled availably by altering procedure parameters. The structure of powder is mainly double phase IMC-Al particulate composite. In addition, there are certain corresponding relation between the compositions of evaporate source master material and phase composition of alloy compound nanoparticle. The expected nanoparticle, which is mainly composition of nanocrystalline intermetallic compound, can be obtained through changing the compositions of evaporating source master material.
