氮化钛镀膜对纯钛铸件表面耐磨性的影响
Effects of titanium nitride coating on wear resistance of cast titanium
作者：佟宇1 郭天文2 肖慧军3 王菁2 梁海锋4
Author：TONG Yu1, GUO Tian-wen2, XIAO Hui-jun3, WANG Jing2, LIANG Hai-feng4.
收稿日期：2010-08-23 年卷（期）页码：2011,38(1):31-33
期刊名称：国际口腔医学杂志
Journal Name：International Journal of Stomatology
关键字：氮化钛, 闭合场非平衡磁控溅射, 显微硬度, 耐磨性,
Key words：titanium nitride, closed field unbalanced magnetron sputtering, microhardness, wear resistance,
基金项目：
中文摘要
目的研究氮化钛（TiN）镀膜对纯钛铸件表面硬度和耐磨性的影响。方法应用闭合场非平衡磁控溅射（CFUBMS）方法在纯钛铸件表面制备TiN 薄膜，显微硬度仪测量纯钛铸件表面硬度，磨擦磨损试验评估其耐磨性。结果纯钛铸件表面应用CFUBMS 方法制备TiN 薄膜后，显微硬度明显增加，磨擦系数和磨损体积明显减小。结论CFUBMS 氮化钛镀膜对纯钛铸件有较好的磨损保护作用。
英文摘要
Objective To evaluate the effects of titanium nitride（TiN） coating on surface microhardness and wear resistance of cast titanium. Methods TiN film was deposited on cast titanium using closed field unbalanced magnetron sputtering（CFUBMS）, after that microhardness and wear resistance of the cast titanium specimens were characterized by hardness testing and friction and wear test respectively. Results After TiN films were deposited on cast titanium, its microhardness increased significantly, wear volume and friction coefficient decreased significantly. Conclusion CFUBMS TiN coating can protect cast titanium from abrasion excessively.
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