氨基注入钛表面及其微观分析

Objective The purpose of this study was to determine the effects of amino group implantation on the surface struc- tures of titanium.Methods The amino groups were implanted into the surfaces of titanium using 100 keV amino group ions at ambient temperature (25℃) with the following three different doses: 5×1017, 1×1017and 5×1016ions per cm2. The current density of the ion-beam was (10μA/cm2. The modified surfaces were characterized using X-ray photoelectron spectroscopy (XPS) to determine the chemical components of the modified surfaces. A scanning electron microscope (SEM) was used to study the physical structure of the surfaces.Results The wide XPS profiles, the binding energy data and the SEMphotoswere obtained. The XPS showed that the modi- fied surface contained Ti, O, C and N. The possible chemical states were speculated using Gauss matching analysis. There was no sig- nificant difference between the surfaces with and without implanted amino groups.Conclusion The XPS data reveals that the structure of the modified surface layer of aminogroup-implanted titanium is TiN, comprising a complex structure of titanium and amino compound near the surface. The SEM Photos show that this technique has little effect on the surface structures of materials.