The microvibration response analysis of precision optical equipment support structure is the guarantee of the large optical system working steadily. To analyze whether the response can satisfy the design demand, this paper measure the ground ambient vibration of the precision optical device support structure by the way which is used to measure background sound by removal digital seismograph, analyze the data and discuss how to do support structure microvibration response analysis by the measure data. The spectrum analyse module of ANSYS is used to analyze the mirror mount’s response. The results indicate that the mirror mount under the effect of micro vibration can satisfy design demand.
