硝酸-冰乙酸腐蚀对CdTe太阳电池性能的影响
Effect of Nitric acetic Acid Etching on the Properties of CdTe Solar Cells
作者：李卫(四川大学 材料科学与工程学院,四川 成都６１００６4)；冯良桓(四川大学 材料科学与工程学院,四川 成都６１００６4)；蔡亚平(四川大学 材料科学与工程学院,四川 成都６１００６4)
Author：(School of Materials Sci. and Eng.,Sichuan Univ.,Chengdu 610065,China)；(School of Materials Sci. and Eng.,Sichuan Univ.,Chengdu 610065,China)；(School of Materials Sci. and Eng.,Sichuan Univ.,Chengdu 610065,China)
收稿日期：2006-11-17 年卷（期）页码：2007,39(4):109-112
期刊名称：工程科学与技术
Journal Name：Advanced Engineering Sciences
关键字：腐蚀;背接触;CdTe太阳电池
Key words：etch;back contact;CdTe solar cells
基金项目：国家高技术研究与发展计划(2003AA513010);四川省科技攻关项目(05GG021-003-3);辐射物理及技术教育部重点实验室（四川大学）
中文摘要
在CdTe与金属背电极间形成稳定的低电阻接触，有助于提高CdTe太阳电池性能。采用硝酸-冰乙酸腐蚀CdTe薄膜并用真空蒸发法沉积铜背接触层，制备CdTe太阳电池。结果表明，化学腐蚀后在膜面生成了富碲层，硝酸-冰乙酸腐蚀为各向同性刻蚀。对背接触层进行优化退火处理，获得转化效率11.75%的CdTe太阳电池。
英文摘要
Forming a low resistance contact to CdTe thin films is a key issue for successful improvement of the performance of CdTe solar cells. The CdTe thin films were etched with nitric-acetic (NA) acid and a Cu back contact layer was deposited onto the etched CdTe surface, then the CdTe solar cells were fabricated. The results indicated that the nitric acetic acid pretreatment forms a highly conductive Te layer on the back surface of the CdTe thin films and it is an isotropic etching. An efficiency of 11.75% for CdTe solar cells was obtained when the back contact layer was annealed under optimum conditions.
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