直驱气浮平台的工作模态分析方法及实验验证
An analysis method and experimental verification of the operating modal for the direct-drive air bearing stage
作者：陈东生(中国工程物理研究院机械制造工艺研究所)；楚翀(中国工程物理研究院机械制造工艺研究所)；余德平(四川大学制造科学与工程学院)；刘佳鑫(四川大学制造科学与工程学院)
Author：Dongsheng Chen(Institude of Mechanical Technology,China Academy of Engineering and Physics)；Chong Chu(Institude of Mechanical Technology,China Academy of Engineering and Physics)；Deping Yu(School of Manufacture Science and Engineering,Sichuan University)；Jiaxin Liu(School of Manufacture Science and Engineering,Sichuan University)
收稿日期：2019-03-13 年卷（期）页码：2020,52(5):-
期刊名称：工程科学与技术
Journal Name：Advanced Engineering Sciences
关键字：气浮平台；机电耦合；工作模态；模态测试
Key words：Air bearing stage;Electric-mechanical coupling; Operating modal;Modal test.
基金项目：国家“高档数控机床与基础制造装备”科技重大专项“巨型激光装置光学元件超精密制造系统示范工程”课题资助（课题号2017ZX04022001）
中文摘要
直驱气浮平台是集气浮支承、伺服驱动及机械结构为一体的精密运动系统,它具有较复杂的振动性能,一般通过模态分析得到机械结构的振动性能,但在工程应用中,我们更需要获得驱动作用下平台工作时的振动性能。为简单、快捷、准确地分析平台工作状态的振动性能,本文提出一种机电耦合的振动分析方法,即将驱动系统的伺服特性和气浮支承的气膜特性均等效成弹簧阻尼单元,建立机电耦合仿真模型,基于该模型分析得到平台工作状态下的振动模态。为验证该方法,采用LMS模态测试仪对平台进行模态测试,试验结果同仿真结果较一致,基于此方法分析计算得到的振动模态最大偏差为8.16%；模态实验表明所提出的机电耦合模态分析方法可以准确地分析平台工作状态的振动特性。
英文摘要
The direct-drive air bearing stage is a precise motion system integrating air bearing, servo drive and mechanical structure. It has more complex vibration characteristics. Generally, the vibration characteristics of the stage are analyzed by the vibration modes of the mechanical structure. But in engineering applications, we need to obtain the working modal of the stage under the driving force. In this paper, to analyze the vibration characteristics of the working state of the stage simply, quickly and accurately, a new electric-mechanical coupling simulation method is presented. The servo characteristics of the drive system and the film characteristics of the air bearing are all equivalent to the spring damping units, and the electromechanical coupling simulation model of the direct-drive air bearing stage is established. Based on the model, the vibration modes under the working condition of the stage are obtained. To validate the analysis method,the LMS modal test instrument is used to test the modal of the real stage. The experimental results are consistent with the simulation results. The experimental results suggest that the maximum vibration deviation of the vibration modes calculated by the electromechanical coupling method is 8.16%. The experiments show that the electromechanical coupled modal analysis method can accurately analyze the vibration characteristics of the working state of the stage.
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