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论文摘要

基于激光干涉测量的高频液体正弦压力校准

High Frequency Liquid Sinusoidal Pressure Calibration Based on Laser Interferometry

作者:李博(北京长城计量测试技术研究所);杨军(北京长城计量测试技术研究所);黄楠(中国北方车辆研究所);黄日恒(北京长城计量测试技术研究所);尹肖(北京长城计量测试技术研究所);石玉松(北京长城计量测试技术研究所)

Author:LI Bo(Changcheng Institute of Metrology Measurement);YANG Jun(Changcheng Institute of Metrology Measurement);HUANG Nan(China North Vehicle Research Institute);HUANG Riheng(Changcheng Institute of Metrology Measurement);YIN Xiao(Changcheng Institute of Metrology Measurement);SHI Yusong(Changcheng Institute of Metrology Measurement)

收稿日期:2019-06-29          年卷(期)页码:2020,52(5):-

期刊名称:工程科学与技术

Journal Name:Advanced Engineering Sciences

关键字:正弦压力;激光干涉测量;动态校准;压力传感器;折射率

Key words:sinusoidal pressure; laser interferometry; dynamic calibration; pressure transducer; refractive index

基金项目:国家“十三五”技术基础项目(JSJL2015205B015);国家自然科学基金(51775526)

中文摘要

在武器装备研制与工程应用中会使用大量动态压力传感器进行评估与测试,为了提高测量精度和数据可靠性,针对动态压力传感器的幅值灵敏度在高频率正弦压力校准中的量值溯源问题,提出一种基于激光干涉技术测量液体介质折射率随压力改变的方法用于高频液体正弦压力校准装置。利用压电叠堆效应和管腔谐振原理,可以驱动液体介质产生频率高达30kHz的正弦压力信号,根据洛伦兹洛伦茨理论建立压力与液体光程的数学模型,利用激光干涉仪测量液体中光程改变,得到正弦压力幅值大小,使正弦压力幅值可以得到溯源。结合实际校准过程,对压力分布不均、温度变化、结构形变、振动等影响因素进行了理论研究与实验分析,并利用基于激光干涉测量的高频液体正弦压力校准装置开展对动态压力传感器幅值灵敏度校准不确定度的完整评估。结果表明:激光干涉法高频液体正弦压力校准装置的正弦压力幅值覆盖范围0.01MPa~1MPa,静态压力环境可以实现0~10MPa,在频率范围1kHz~30kHz下幅值灵敏度校准的扩展不确定度在7.6%以内。

英文摘要

A large number of dynamic pressure sensors are used to evaluate and test in the development of weapon equipment and engineering application. In order to improve measurement accuracy and data reliability, solving the problem of traceability of amplitude sensitivity of dynamic pressure sensor in high frequency sinusoidal pressure calibration, a method based on laser interferometry to measure the refractive index of liquid medium changing with pressure is applied to calibration device of high frequency liquid sinusoidal pressure. Using piezoelectric stack effect and cavity resonance principle, the sinusoidal pressure signal with frequency up to 30 kHz can be driven by liquid medium. Based on Lorentz-Lorentz theory, a mathematical model of pressure and liquid optical path is established. Laser interferometer is used to measure the change of optical path in liquid, and the magnitude of sinusoidal pressure is obtained, so that the sinusoidal pressure amplitude can be traced back to basic quantity. Combining with the actual calibration process, the influence factors such as uneven pressure distribution, temperature change, structural deformation, vibration and so on are analyzed theoretically and experimentally. Based on the high frequency liquid sinusoidal pressure calibration device of laser interferometry, the uncertainty of amplitude sensitivity calibration of dynamic pressure sensor is evaluated. The results show that the sinusoidal pressure range of calibration device of high frequency liquid sinusoidal pressure by laser interferometry is 0.01 MPa~1 MPa, the static pressure environment can achieve 0~10 MPa, and the expanded uncertainty of amplitude sensitivity calibration is within 7.6% in the frequency range of 1 kHz~30 kHz.

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