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论文摘要

脉冲串毫秒激光对单晶硅的热损伤

Thermal damage of monocrystalline silicon by multi-pulsed millisecond Laser

作者:郭明(吉林工程技术师范学院 量子信息技术交叉学科研究院);张永祥(长春理工大学光电信息学院机械工程分院);李宏(吉林工程技术师范学院)

Author:Ming Guo(Jilin Engineering Normal University,Institute for Interdisciplinary Quantum Information Technology,Changchun);Yong-xiang Zhang(College of Optical and Electronical Information Changchun University of Science and Technology);李宏()

收稿日期:2019-05-28          年卷(期)页码:2020,52(6):-

期刊名称:工程科学与技术

Journal Name:Advanced Engineering Sciences

关键字:毫秒脉冲; 激光; 单晶硅; 脉冲串; 热损伤

Key words:millisecond pulse; laser; monocrystalline silicon; pulse train; thermal damage

基金项目:吉林省教育厅“十三五”科学研究规划项目(JJKH20190765KJ);吉林工程技术师范学院博士科研启动经费专项(BSKJ201824);吉林工程技术师范学院校级一般项目(XYB201819)

中文摘要

单晶硅广泛应用于光电系统领域,在激光作用下易于造成热损伤,其性能将发生显著变化。针对高精激光武器和激光精细加工产业的迫切需求,本文研究脉冲串毫秒激光作用单晶硅的热损伤问题,分析激光能量密度、脉冲个数等与热损伤的重要特性参数温度的关系,探索损伤规律和机理。从仿真和实验两方面对脉冲串毫秒激光对单晶硅的热损伤进行研究。基于热传导方程建立毫秒脉冲激光辐照单晶硅的热损伤模型,利用有限元、有限差分方法求解脉冲串毫秒激光作用单晶硅的温度场,模型中引入等效比热容的方法处理熔融和汽化后的相变问题,实现了对模型温升的修正。构建毫秒脉冲激光损伤单晶硅的温度测量系统,利用高精度点温仪对脉冲时间内的激光辐照中心点温度进行实时测量。研究结果表明,脉冲串激光作用单晶硅靶材时,激光辐照中心点及径向、轴向位置具有温度累积效应,径向温升范围远大于轴向;随激光能量密度增加,温度累积效应显著;随着脉冲个数的增加,单晶硅靶材熔融固化时间和从熔点降至常温的时间加长;激光脉冲个数增加90个时,单晶硅热损伤阈值下降到单脉冲损伤阈值的73.8%;当脉冲个数增加后,单晶硅损伤面积增大。实验与仿真研究结果对比可以看出,两方面研究结果的规律基本一致,仿真模型可以合理的描述毫秒脉冲激光损伤单晶硅的过程。

英文摘要

Monocrystalline silicon is widely used in the field of photoelectric systems, and it is easy to cause thermal damage when it is applied by laser, and the performance will change significantly. For the urgent needs of high-precision laser weapons and laser fine processing industry, We study the thermal damage of monocrystalline silicon irradiated by pulse train of millisecond laser the relationship between laser energy density, number of pulses and other important parameters of thermal damage is analyzed, and the damage law and mechanism are explored. Thermal damage of monocrystalline silicon by pulse train of millisecond laser was studied from both simulation and experimental aspects. Based on the heat conduction equation, a thermal damage model of monocrystalline silicon irradiated by pulse train of millisecond laser is established, finite element and finite difference methods are used to solve temperature field of monocrystalline silicon treated by pulse train of millisecond laser. The equivalent specific heat capacity is introduced into the model to deal with the phase change after melting and vaporization, and the temperature rise of the model is corrected. The temperature measurement system of millisecond pulse laser damage monocrystalline silicon was constructed, and the high-precision spot temperature meter was used to measure the laser irradiation center point temperature in real time. Research indicates, when a pulsed laser is applied to monocrystalline silicon target, the center point of the laser irradiation and the radial and axial positions have a temperature accumulation effect, and the radial temperature rise range is much larger than the axial direction; With the increase of laser energy density, the temperature accumulation effect is significant; as the number of pulses increases, the melting time of monocrystalline silicon and the time from the melting point to the normal temperature are lengthened; when the number of laser pulses is increased to 90, The thermal damage threshold of monocrystalline silicon decreased to 73.8% of the single pulse damage threshold; when the number of pulses increased, the damage area of monocrystalline silicon increased. Comparing the experimental and simulation results, it can be seen that the laws of the two aspects are basically the same. The simulation model can reasonably describe the process of millisecond pulse laser damage to monocrystalline silicon.

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