期刊导航

论文摘要

新型焊头结构与运动机构的研究及开发

The Research and Development of a New Kind of Head Structure and Motion Mechanism

作者:袁清珂(广东工业大学);唐鹏(广东工业大学 机电工程学院 广东 广州 510006);骆少明(广东工业大学 机电工程学院 广东 广州 510006)

Author:Yuan Qingke(Guangdong University of Technology);唐鹏();骆少明()

收稿日期:2008-08-03          年卷(期)页码:2009,41(5):182-186

期刊名称:工程科学与技术

Journal Name:Advanced Engineering Sciences

关键字:半导体设备制造; 产品开发; 机构; 运动学; 焊头机构

Key words:semiconductor device manufacture; product development; mechanism; kinematics; head mechanism

基金项目:国家高技术研究发展计划

中文摘要

为实现LED芯片键合机对芯片的高速高精确地拾取、传送和粘贴等功能,本文综合运用曲柄摇杆机构和偏心轮机构开发了一种新型焊头结构与运动机构。首先,分析了焊头总成的工作过程和要求,研究了焊头机构的工作原理,设计了曲柄摇杆结构的运动参数,开发了端面偏心轮机构,讨论了焊头机构的运动时间序列。接着,应用pro/Engineer进行了零件和机构总成的结构设计,运用Mechanism/Pro建立了机构运动模型、驱动模型,实现了机构的运动仿真,分析了仿真结果,优化了焊头结构和机构参数。最后,通过实物样机的实际测试,验证了设计开发和仿真模型的正确性,所开发的焊头机构已成功应用于设备生产,提高了整机性能。

英文摘要

In this paper, a new kind of head structure and motion mechanism were developed by integrating synthetically a crank-rocker mechanism and a head face eccenter mechanism, that realize the operating functions of LED chip die bonders to drive chip of, such as picking up, carrying and bonding. Firstly, the working process and requirements of the head assembly were analyzed, the working theory of the head mecahniam was studied, the motion parameters of the crank-rocker mechanism were designed, a head face eccenter mechanism was developed, the motion time sequence of the excutive mechanisms was discussed. Secondly, the parts and assembly of the head structure and motion mechanism were designed by using pro/Engineer, the mechanim motion models and driving models were built, the motion simulation of the head mechanism was realized by using Mechanism/pro, the simulation results were analized, the head structure and mechanism parameters were optimized. Finally, the feasibility and rationality of the designed head mechanism and its simulation models were verified by testing the physical prototype, the developed head mechanism has been used in the whole equipment successfully, the performances of whole equipment have risen significantly.

关闭

Copyright © 2020四川大学期刊社 版权所有.

地址:成都市一环路南一段24号

邮编:610065