金属铌表面Ar/O2等离子体在线清洗的实验研究
Experimental study on on-line cleaning of Ar/O2 plasma on metal niobium surface
作者：李敏(四川大学原子与分子物理研究所)；杨黎(四川大学原子核科学技术研究所)；陈建军(四川大学原子核科学技术研究所)；陈波(四川大学原子核科学技术研究所)；王宏彬(四川大学原子核科学技术研究所)；吴安东(中国科学院近代物理研究所)；叶宗标(四川大学原子核科学技术研究所)；芶富均(四川大学原子核科学技术研究所)；韦建军(四川大学原子与分子物理研究所)
Author：LI Min(Institute of Atomic and Molecular Physics, Sichuan University)；YANG Li(Institute of Nuclear Science and Technology, Sichuan University)；CHEN Jian-Jun(Institute of Nuclear Science and Technology, Sichuan University)；CHEN-Bo(Institute of Nuclear Science and Technology, Sichuan University)；WANG Hong-Bin(Institute of Nuclear Science and Technology, Sichuan University)；WU An-Dong(Institute of Modern Physics, Chinese Academy of Science)；YE Zong-Biao(Institute of Nuclear Science and Technology, Sichuan University)；GOU Fu-Jun(Institute of Nuclear Science and Technology, Sichuan University)；WEI Jian-Jun(Institute of Atomic and Molecular Physics, Sichuan University)
收稿日期：2019-07-17 年卷（期）页码：2020,57(6):1147-1151
期刊名称：四川大学学报: 自然科学版
Journal Name：Journal of Sichuan University (Natural Science Edition)
关键字：等离子体清洗；在线监测；功函数；残余气体
Key words：Plasma cleaning; Online monitoring; Work function; Residual gas
基金项目：国家重点基础研究发展计划
中文摘要
超导铌腔的碳氢污染问题导致铌表面的功函数下降, 引起场致发射, 使超导腔的加速梯度恶化, 运行一段时间后必须对其碳氢污染进行清洗才能保证正常使用. 针对众多清洗装置用等离子体清洗后无法对其清洗效果进行准确、及时地判断从而控制清洗截止点, 而采用离线测试又会造成一定的二次污染的问题,本文提出了基于静电四极等离子体(Electrostatic Quadrupole Plasma, EQP)质谱分析仪及开尔文探针的等离子体清洗及在线监测装置, 成功地将等离子体清洗与残余气体监测集成并投入使用. 实验过程中, 通过在线监测清洗的副产物及功函数的变化, 证明了电感耦合等离子体源产生的密度为1016~1017 m-3的氩、氧混合等离子体, 能有效清除铌样品表面的碳氢污染, 并对铌表面进行一定的氧化改性, 将功函数由4.0 eV提升至5.3 eV左右.
英文摘要
Hydrocarbon contamination in superconducting niobium cavity results in the decrease of surface work function of niobium, field emission and the deterioration of accelerating gradient of superconducting cavity. After working for a period of time, it is necessary to clean the hydrocarbon contamination to ensure its normal running. At present, the cleaning effect after plasma processing cannot be judged accurately and timely to control the cleaning cut-off point. In addition, the off-line testing may cause some secondary pollution.Therefore, we present a plasma cleaning and on-line monitoring device based on electrostatic quadrupole plasma (EQP) mass spectrometer and Kelvin probe. The plasma cleaning and residual gas monitoring were successfully integrated and put into use. During the experiment, the changes of cleaning byproducts and work function were monitored online. It was proved that the Ar/O2 mixed plasma produced by the inductively coupled plasma source with a plasma density of 1016~1017m-3 could effectively remove hydrocarbon contaminations from niobium surface and make oxidation modification on niobium surface, raising the work function from 4.0 eV to 5.3 eV.
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