阳极Ta/Ta2O5的薄膜曲界面结构特征及形成机理
Curve surface structure characteristics and forming mechanism of anode Ta/Ta2O5 film
作者：石维(铜仁学院材料与化学工程学院; 中国振华(集团)新云电子元器件有限责任公司; 电子科技大学微电子与固体电子学院)；杨邦朝(电子科技大学微电子与固体电子学院)；张选红(中国振华(集团)新云电子元器件有限责任公司)
Author：SHI Wei(College of materials and Chemistry, Tongren University; Xinyun electronic co. , LTD, Zhenhua Electronics Group; School of Microelectronics and Solid-state Electronics, University of Electronic Science and Technology of China)；YANG Bang-Chao(School of Microelectronics and Solid-state Electronics, University of Electronic Science and Technology of China)；ZHANG Xuan-Hong(Xinyun electronic co. , LTD, Zhenhua Electronics Group)
收稿日期：2014-08-17 年卷（期）页码：2016,53(2):409-412
期刊名称：四川大学学报: 自然科学版
Journal Name：Journal of Sichuan University (Natural Science Edition)
关键字：钽电解电容器; Ta2O5薄膜; 微结构; 电场畸变; 曲面;
Key words：Tantalum electrolytic capacitor; Ta2O5 thin films ; Microstructure ; Electric field distortion; Curved Surface;
基金项目：贵州省教育厅125重大专项字[2013](027)；贵州省科技厅黔省专合字2012(06)支助项目
中文摘要
采用电化学方法制备了钽电解电容器阳极.通过场发射扫描电镜和理论分析对钽阳极断面的曲面结构特征及其形成机理进行了研究.研究结果发现Ta/Ta2O5的薄膜曲界面存在间隙层(
英文摘要
Tantalum electrolytic capacitor anode was prepared by electrochemical method. The surface structure characteristics and formation mechanism Tantalum electrolytic capacitor anode was prepared by electrochemical method. The surface structure characteristics and formation mechanism of tantalum anode section were studied by field emission scanning electron microscopy (SEM) and theoretical analysis. The results show that a gap layer (
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