利用灰度掩膜光刻技术制备螺旋相位片
Fabrication of helical phase plate by using gray-scale mask lithography
作者：周静(四川大学物理科学与技术学院; 四川大学高能量密度物理及技术教育部重点实验室)；阳泽建(四川大学物理科学与技术学院; 中英联合材料研究所)；高福华(四川大学物理科学与技术学院; 中英联合材料研究所; 四川大学高能量密度物理及技术教育部重点实验室)；杜惊雷(四川大学物理科学与技术学院; 中英联合材料研究所; 四川大学高能量密度物理及技术教育部重点实验室)
Author：ZHOU Jing(College of Physical and Technology, Sichuan University; Key Laboratory of High Energy Density Physics and Technology, Ministry of Education, Sichuan University)；YANG Ze-Jian(College of Physical Science and Technology, Sichuan University; Sino-British Joint Materials Research Institute)；GAO Fu-Hua(College of Physical Science and Technology, Sichuan University; Sino-British Joint Materials Research Institute; Key Laboratory of High Energy Density Physics and Technology, Ministry of Education, Sichuan University)；DU Jing-Lei(College of Physical Science and Technology, Sichuan University; Sino-British Joint Materials Research Institute; Key Laboratory of High Energy Density Physics and Technology, Ministry of Education, Sichuan University)
收稿日期：2015-10-26 年卷（期）页码：2016,53(5):1107-1112
期刊名称：四川大学学报: 自然科学版
Journal Name：Journal of Sichuan University (Natural Science Edition)
关键字：涡旋光束；螺旋相位片；轨道角动量；灰度掩膜光刻
Key words：Vortex beams; Helical phase plate; Orbital angular momentum; Gray-scale mask lithography
基金项目：国家自然科学基金
中文摘要
螺旋相位片（Spiral phase plate简称SPP）是产生轨道角动量光束的一种重要光学器件，在光束调控、量子信息等领域有着重要应用。本文提出了一种基于计算机打印灰度掩膜的螺旋相位片的加工方法，详细讨论了SPP设计方法和光刻工艺，并实验制作了拓扑电荷为3的螺旋相位片，利用马赫-策德尔干涉仪实验对SPP产生涡旋光束进行了检测，获得良好的螺旋相位干涉图。本文的研究结果为低成本、高质量、高效率的螺旋相位片加工技术提供了一种有用途径.
英文摘要
Spiral phase plate (SPP) can be used to generate orbital-angular-momentum (OAM) light beams which have great applications in optical manipulation, quantum information and so on. In this paper, we developed an economical method for fabricating SPP by employing the printed Continuous Gray-scale Mask (CGM). The design approach and photolithography progress are discussed in detail. As the results, a practical SPP with topological charge L=3 is fabricated and tested by optical surface profile (Counter GT) and Mach-Zehnder interferometer. Our results show a low-cost and high efficiency processing method to fabricate high quality SPP.
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