In this paper, the LiFePO4 thin films based on three-dimensional (3-D) TiO2 nanotubes were prepared by radio frequency (RF) magnetron sputtering method. The results show that the contact area between LiFePO4 film and the electrolyte and the utilization efficiency of the cathode material were increased with the help of this 3-D structure. Meanwhile, it can also effectively shorten the migration path of lithium ions, and make up for the deficiency of the low lithium ion diffusion rate. Therefore, the dynamics properties of the electrode materials could be enhanced.