Objective To evaluated the bonding strength between pure titanium and Solidex after deposition by magnetron sputtering TiSiN with different content of Si(9%, 19%) and analyzed the surface component by electron probe micro- analysis(EPMA). Methods All pure titanium samples divided into 3 groups according to different surface treatment, then bonded with Solidex light- cured composite. Material test machine was used to measure bonding strength and the surface was analyzed by EPMA. Results The bonding strength of deposition with TiSiN groups were higher than unfilming group, increasing the content of Si could enhance the bonding strength between pure titanium and Solidex in TiSiN groups(P