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论文摘要

相位测量轮廓术中一种快速的系统标定方法

A Fast Calibration Method for the Phase Measuring Profilometry

作者:肖焱山(四川大学 光电科学系;三峡大学 理学院);曹益平(四川大学 光电科学系);武迎春(四川大学 光电科学系);刘效勇(四川大学 光电科学系)

Author:Xiao Yanshan(Dept. of Optoelectronics,Sichuan Univ.;College of Sci.,China Three Gorges Univ.);Cao Yiping(Dept. of Optoelectronics,Sichuan Univ.);Wu Yingchun(Dept. of Optoelectronics,Sichuan Univ.);Liu Xiaoyong(Dept. of Optoelectronics,Sichuan Univ.)

收稿日期:2012-06-28          年卷(期)页码:2013,45(1):164-168

期刊名称:工程科学与技术

Journal Name:Advanced Engineering Sciences

关键字:相位测量轮廓术;相位高度映射;系统标定;3维面形测量;快速

Key words:phase measuring profilometry;phase-to-height mapping;system calibration;three-dimensional shape measurement;fast

基金项目:国家科技重大专项(2009ZX02204-008);国家“863”计划资助项目(2007AA01Z333);四川省学术和技术带头人培养基金资助项目(07GRC-01);湖北省教育厅自然科学研究资助项目(B201001203)

中文摘要

传统的系统标定和相位测量是分开进行的,所测量的是物体相对于参考面的高度。提出一种快速的系统标定方法,用块规代替传统方法中由机械移动装置控制的标准平面,在块规表面采样标定点完成系统标定,实现系统标定与待测物相位测量的同步进行;当待测物支撑面与参考面不重合时,依然能准确测量物体相对支撑面的高度。对一高度为14.00 mm的立方块测量的结果显示,当其支撑面相对参考面发生纵向移动或倾斜时平均相对误差不高于1.35%,均方差小于0.15 mm。该方法简化了标定过程,在实际应用中更具普适性。

英文摘要

A fast calibration was proposed, in which two gauge blocks were used to replace the standard plane controlled by the mechanical shifting device in the traditional calibration, and fewer datum points were sampled from the surface of the gauge blocks to calibrate the system. With this method, both system calibration and phase measurement can be implemented simultaneously. The real height of the object relative to the supporting plane can be obtained when the supporting plane was not superposed on the reference. A cuboid block of normal height of 14.00 mm was successfully measured by this method. Its mean relative error was no more than 1.35% and the root-mean-square error was less than 0.15 mm. The calibration was simplified and became more flexible with the proposed method.

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