期刊导航

论文摘要

非球面Ronchi检测的误差分析

Error Analysis of Ronchi Test for Aspherical Mirrors

作者:郭春凤(四川大学 光电科学技术系);苏显渝(四川大学 光电科学技术系);雷柏平(中国科学院 成都光电技术研究所);伍凡(中国科学院 成都光电技术研究所)

Author:Guo Chunfeng(Dept. of Opt-Electronics,Sichuan Univ.);Su Xianyu(Dept. of Opt-Electronics,Sichuan Univ.);Lei Baiping(Inst. of Optics and Electronics,Chinese Academy of Sciences);Wu Fan(Inst. of Optics and Electronics,Chinese Academy of Sciences)

收稿日期:2010-06-23          年卷(期)页码:2011,43(4):149-153

期刊名称:工程科学与技术

Journal Name:Advanced Engineering Sciences

关键字:光学测量;误差分析;Ronchi检测;非球面镜;同步相位探测技术

Key words:optical measurement;error analysis;Ronchi test;aspherical mirrors;synchronous phase detection technology

基金项目:国家自然科学基金资助项目(60838002)

中文摘要

为了较高精度地检测大型非球面面形,需要分析检测装置对测量误差产生的影响。基于Ronchi检测法,将正弦光栅代替Ronchi光栅应用在非球面反射镜的检测上,采用同步相位探测技术和几何原理获得所有被测点的面形偏差梯度信息,然后利用区域波前重构法恢复面形偏差,进而重建被测面形。利用此方法首次分析了叠栅条纹图、非球面度、光栅对比度对重建被测面形的影响。数值结果表明,条纹图的重叠和光栅的对比度均对非球面的检测精度有影响,重建面形误差随着被测面形非球面度的增加而增大。对测量误差的分析可为Ronchi检测装置的设计提供有效、可靠的依据。

英文摘要

In order to measure aspherical surfaces more accurately, the influence of test device on measurement error was analyzed. Instead of ronchi grating, sinusoidal grating was used to test aspherical mirrors based on the Ronchi method.By synchronous phase detection technology and geometrical theory, shape deviation gradients of all tested points could be obtained. Then the surface of the tested mirror was reconstructed after restoring shape deviations using area wave-front reconstruction method.The influence of combination fringes, asphericity and grating contrast on reconstructed tested surface were presented.The numerical results showed that both the combination fringes and grating contrast affect the testing accuracy of aspherical surface, and the error of reconstruction increases with asphericity.The results may provide an affective and reliable basis for Ronchi test device.

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