In order to study the thermal, shrinkage deformation and crack mechanism of concrete, its temperature, moisture and stress distribution was calculated based on the theory of heat, mass transfer and hydration as well as finite element method. The finite element method was used in space domain, two-point time difference scheme was used in time domain, and the finite element program was coded. With the application of this program, the process of concrete structure poured in different situations was simulated. The result showed that drying shrinkage is a major cause of the deterioration of concrete structures, but proper control measures can decrease the stress of concrete, crack can be prevented.